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Temporary Bonder Machine

Dual-arm combined placement enables the fastest placement speed of 84,000 CPH (under our optimal conditions).

The dual-arm dual-drive system effectively ensures precision and consistency during high-speed operation.

2”~8” Temporary Bonder Machine

Temporary Bonder Machine 2

Semi-auto bonding machine

Temporary bonding equipment

Auto bonding machine

  • Substrate Size : 2’’~8’’
  • Bonding Material : Wax, Glue
  • Bonding Temperature : ≤ 350°C
  • Bonding Force : ≤ 400N
  • Center Align : ≤0.1mm(Auto) ≤0.5mm(Semi-Auto)
  • After Bonding TTV : ≤ 3.0um
  • Application : Si, GaN, GaAs, SiC

8”~12” Temporary Bonder Machine

Temporary bonding equipment

Semi-auto bonding machine

Temporary bonding equipment

Auto bonding machine

  • Bonding Material : Glue
  • Bonding Material : Wax, Glue
  • Bonding Temperature : ≤ 350°C
  • Bonding Force : ≤ 60kN
  • Center Align : ≤50um
  • After Bonding TTV : ≤ 4.0um
  • WPH : ≥ 8
  • Application : Fan-Out, 2.5D/3D

2”~8” Thermal De-Bonder

Temporary Bonder Machine 2

Semi-auto bonding machine

2”~8” Thermal De-Bonder

Auto bonding machine

  • Substrate Size : 2’’~8’’
  • De-Bonding Material : Wax, Glue
  • De-Bonding Temperature : ≤ 350°C
  • Wafer Thickness : 30um~1000um
  • Application : Si, GaN, GaAs, SiC

8”~12” Laser De-Bonder

Temporary bonding equipment
Laser Debonding Equipment

Semi-auto

8’’~12’’ Permanent Bond and Align system

Temporary bonding equipment

Bonding Chamber

Temporary bonding equipment

Alignment System

  • Substrate Size : 8’’~12’’
  • Bonding Material : Si-Si, Si-Glass, Metal-Metal
  • Bonding Temperature : ≤ 550°C
  • Bonding Force : ≤ 60kN
  • Alignment Accuracy : ≤±2.0um
  • Application : Fusion Bond, Anodic Bond, Plasma Activation Bond

Permanent Bond and Align system

Table of Contents

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Permanent Bond and Align system

  1. Load Port
  2. Transfer Robot
  3. Pre-Aligner
  4. Plasma Chamber
  5. RCA Cleaner
  6. Aligner
  7. Bond Chamber

Process Flow

RCA Clean → Plasma Treatment → Alignment → Bonding → Anneal

How to Choose Equipment

Temporary bonding equipment

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