Laser internal modification cutting is to focus the infrared laser beam inside the wafer and form an internal ” The wafer is cut into individual chips by applying external force to the wafer .
Based on the mature LED dicing machine platform with higher precision and higher efficiency Prepare DSI – MC -9201 .
Serial number | Device Name | Country of origin | Modell | Menge | Functions and parameters |
1 | Laser | China | U- fast | 1 | 3.0W@50KHZ;3.5W@100KHZ (light outlet) 50~200 KHZ adjustable |
1 | X/Y linear work tower | Selbst gemacht | 400*600 XY | 1 | 1) Stroke: 400X 600 mm 2) Resolution: Y= 0.1 μm; X=0.5um 3) Y repeat positioning accuracy: <=1μm (see Appendix 1) 4) X straightness: 1 um / 300 mm (see Appendix 2) |
2 | DD Motor and Driver | Import | / | 1 | 1) Maximum speed: 2.4rps 2) Rated speed: 2.0 rps 3) Encoder resolution: 26214400 p/ rev 4) Installation surface flatness: less than 10 um |
3 | CCD | Outsourcing | / | 4 | 1) Wide Angle 500W 2) Size and angle correction 1.3 million pixels; 3) Focus 300,000 pixels 4) High pixel telecentric lens |
4 | Z- axis | Import | / | 2 | 1) 0-8mm range 2) Repeat positioning accuracy: +/-1 um |
1 | Power requirements | 220V/single phase/50 HZ /16A; Power grid fluctuation: <5% The power plug of the device is a standard three-flat plug |
2 | Ambient temperature | 22~26℃; Temperature variation ±1℃ |
3 | Environment humidity | 40~70% No condensation |
4 | Pressluft | 0.6~0.7Mpa, equipment interface pipe diameter p12 mm |
5 | Environmental vibration requirements | Foundation amplitude <5μm Vibration acceleration <0.05G |
6 | Situations to avoid | ● Places with lots of garbage, dust, and oil mist; ● Places with lots of vibration and impact; ● Places where medicines and flammable and explosive materials can be touched; ● Locations near high-frequency interference sources; ● Places where the temperature changes rapidly; ● In CO2, NOX In environments with high concentrations of SOX, etc. |
Rm3A08 (4. Stock) Block D, Huashengtai Technology Park, No.36 Hangkong Road, Baoan District, Shenzhen City, China
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