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Vacuum Plasma Cleaner

HW-PL150MA is a low-temperature vacuum plasma cleaner machine consisting of a vacuum chamber, high-frequency plasma power supply, vacuum pumping system, inflation system, and automatic control system. It can enhance adhesion and bonding strength while removing organic pollutants, oil stains, or grease.

Vacuum Plasma Cleaner Machine

The cleaning flow of the vacuum plasma machine: load the products into vacuum chamber—-start the engine to exhaust the room to a standard vacuum level of about 10Pa (this usually takes a few minutes) —-inlet the gas (oxygen, argon, hydrogen, nitrogen, carbon tetrafluoride, etc.) into the vacuum chamber and keep the inside pressure stable—-apply high-frequency voltage in the vacuum chamber to penetrate the gas and occur of plasma, and begin to cleaning process. —- After cleaning finishing, cut off the power supply, and the gas and vaporized dirt are extracted and discharged by the vacuum pump.

We have a full range of vacuum plasma cleaner machine, please contact us to discuss your individual requirement.

  • The plasma process is a gas-solid phase dry reaction, with no need for water or chemicals and no pollution to the environment.
  • Wide applicability: all types of substrates can be treated, such as metals, semiconductors, oxides, most polymer materials, etc.
  • Low temperature, close to room temperature, especially suitable for polymer materials.
  • It is a simple device, easy to operate and maintain, and a much lower cost than wet cleaning.

Model

HW-PL100

Dimension (W*H*D)

1100*1030*1680mm

Vacuum chamber size(W*H*D)

500*450*500mm

Vacuum chamber material

316 stainless steels

Flow controller

0-800ml/min

Cleaning time

1-9999s adjustable

Volume

100L

Plasma source power

0-500W adjustable

RF power frequency

13.56MHZ

General power

3kw

Control system

PLC+ touch screen

Working vacuum

9-30Pa

Power supply

AC380V, 50/60HZ

Built-in horizontal electrode

5 layers

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