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SS 1126 SIC Fully Automatic Chip Splitting Machine

This equipment is mainly used for SIC substrate wafer cutting The splitting process behind the laser processing equipment technology of cutting Art Equipment

SS 1126 SIC Fully Automatic Chip Splitting Machine

Equipment processing size: suitable for 4- inch to 6- inch wafer processing work. Equipment appearance: See the picture on the right.

Supporting special equipment: SIC laser cutting equipment

Main components

Automatic loading and unloading structure Vision Positioning System Stage splitting system Electrical control system Core components are all marble structure

DSI-L-SS1126 SIC Fully automatic splitting machine

Main flow chart

 

DSI-L-SS1126 SIC Fully automatic splitting machine

Processing Capability

The splitting process is to apply a certain amount of slight pressure along the laser scratch path to the product to break the laser scratch. Process: The product is placed on a symmetrical support table (the middle distance is adjustable ) , calibrate the laser cutting position through a high-precision visual system Positioning (micrometer level positioning ) The split knife (blade width 5 um ) above the product is quickly raised and lowered to make the product move along the cutting path . (Laser scratch) Crack and separate .

This technology has been maturely applied to various SIC , silicon wafers, sapphire, and various mixed brittle material fragments, The yield rate in traditional industries is generally above 99%. It has high positioning accuracy, effectively reduces edge collapse, and solves the problem of incomplete twin crystal fracture. The technological advantages of the surface.

Silicon carbide processing solution: chip facing up, blade cutting path:

  • The cleaver acts directly on the chip and is positioned by vision without interfering with the scratching process. Contact with areas outside the road;
  • The blade width is about 5um, and the support table flatness is within 5um. The positioning accuracy of the relevant core motion axis is within 2um to ensure the operation accuracy
  • From the perspective of protecting the wafer and reducing the risk of chipping, it is possible to consider adding a layer of non-sticky release protective film of more than 25um on the front of the chip to make the blade The blade does not directly contact the cutting path, and the blade cracks on the cutting path to give the cutting path The additional pressure can be almost ignored.

 

Laser scribing machine  Application Areas

Primarily used for cutting LED red and yellow light silicon wafer chips, as well as for cutting special materials such as ceramics and metals.

Silicon Wafer Substrate – GaN (Gallium Nitride) applications.

DSI-L-SS1126 SIC Fully automatic splitting machine

Metal Substrates

DSI-LC608 automatic laser scribing machine

SiC Substrates and Laminated Glass

DSI-LC608 automatic laser scribing machine

Compensation of blade depth in split

The crack length is calculated based on the wide-angle profile, and the cutting depth is compensated according to the value in the length compensation table when splitting . Hammer Percent sets the hammer force compensation.

Autofocus function

To solve the focus change caused by the edge warping of LED wafer products during the chipping operation, the software can Set the autofocus area to automatically confirm the focus, ensure the accuracy of the fragmentation, and reduce the calibration level alarm caused by focus changes.

One-click knife loading, Automatic tool setting function

The riving knife can be replaced conveniently by operating the button of the tool loading software ; The automatic tool setting function automatically corrects the position of the riving knife, automatically checks and corrects during operation, and avoids core hardware errors. Product anomalies;

Machine placement requirements

(W)1250 × (D)1000 × (H) 1650 ( mm ) (excluding signal lights) In addition , at least 600 mm

DSI-L-SS1126 SIC Fully automatic splitting machine

Environmental Requirements

Electricity Demand220V/ Single Phase /50Hz/ 10A
Ambient Temperature20-25℃
Environment Humidity20%-60%
Compressed Air0.6MPa
Compressed Air ConnectionΦ8mm
Environmental Vibration RequirementsFoundation Amplitude < 5μm
Vibration Acceleration < 0.05G

Equipment Installation and Commissioning

Equipment installation and commissioning, training plan
Working DaysJob DescriptionRemark
Day 11. Machine installation and placement
2. Machine base level adjustment
3. Machine interior
4. Power on and ventilate the equipment
5. Power on all components of the equipment check
6. Platform accuracy test
 
Day 21. Confirmation of the splinter effect
2. Splinter test according to customer’s on-site requirements
 
Days 3-71. Split test according to customer’s on-site requirements
2. Training: Equipment safety training
3. Training: Introduction to the structure and function of the whole machine
4. Training: Operator Basic operation introduction
5. Training: Operator trial operation
6. Training: Training for administrators on software file creation, parameter settings, etc.
7. Training: Training on handling common problems for administrators
8. Training: Management Simple maintenance training for staff and equipment
Training work based on Customer’s personnel security Row, and training Content mastery Degree, training work According to customer requirements Request for continuation
Day 8 and beyondCooperate with customers to carry out various dicing process tests and equipment acceptance work 

Ensure Production Capacity and Supply Chain

  • Monthly Production Capacity: The production equipment commissioning department has more than 30 commissioning personnel and more than 100 mechanical and electrical assembly personnel. The standard monthly production capacity is 30-40 units/month, and the emergency production capacity can reach 50/month.
  • Delivery: Exclusive supply, original factory supply, advance stocking, and other methods ensure stable delivery time for customers.
  • Production Management: Complete Daju production management system, management methods, personnel composition; material control, material preparation plan, assembly process, installation and debugging, standardized process for the mass production of machines.

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